The 2007 Nobel Prize in Physics can be understood as a global recognition to the rapid development of the Giant Magnetoresistance (GMR), from both the physics and engineering points of view. Behind the utilization of GMR structures as read heads for massive storage magnetic hard disks, important applications as solid state magnetic sensors have emerged. Low cost, compatibility with standard CMOS technologies and high sensitivity are common advantages of these sensors. This way, they have been successfully applied in a lot different environments. In this work, we are trying to collect the Spanish contributions to the progress of the research related to the GMR based sensors covering, among other subjects, the applications, the sensor design, the modelling and the electronic interfaces, focusing on electrical current sensing applications.
Less than thirty years after the giant magnetoresistance (GMR) effect was described, GMR sensors are the preferred choice in many applications demanding the measurement of low magnetic fields in small volumes. This rapid deployment from theoretical basis to market and state-of-the-art applications can be explained by the combination of excellent inherent properties with the feasibility of fabrication, allowing the real integration with many other standard technologies. In this paper, we present a review focusing on how this capability of integration has allowed the improvement of the inherent capabilities and, therefore, the range of application of GMR sensors. After briefly describing the phenomenological basis, we deal on the benefits of low temperature deposition techniques regarding the integration of GMR sensors with flexible (plastic) substrates and pre-processed CMOS chips. In this way, the limit of detection can be improved by means of bettering the sensitivity or reducing the noise. We also report on novel fields of application of GMR sensors by the recapitulation of a number of cases of success of their integration with different heterogeneous complementary elements. We finally describe three fully functional systems, two of them in the bio-technology world, as the proof of how the integrability has been instrumental in the meteoric development of GMR sensors and their applications.
In this paper we present an oscillating conditioning circuit, operating a capacitance-to-time conversion, which is suitable for the readout of differential capacitive sensors. The simple architecture, based on a multiple-feedbacks structure that avoids ground noise disturbs and system calibrations, employs only three Operational Amplifiers (OAs) and a mixer implementing a square wave oscillator that provides an AC sensor excitation voltage. It performs a Period Modulation (PM) and a Pulse Width Modulation (PWM) of the output signal proportionally to the sensor differential capacitance values. The sensor variation range and the detection sensitivity can be easily set through the additional resistors. Preliminary PSpice simulation results have shown a good agreement with theoretical calculations as well as a linear response with a high detection sensitivity of differential capacitive sensors having a baseline in the range [2.2 ÷ 180 pF]. Moreover, different experimental measurements have been also performed by implementing the circuit on a laboratory breadboard using commercial discrete components so validating the idea and providing the circuit performances with different kind of differential capacitive sensors achieving detection resolutions of about 0.1 fF in an overall differential capacitive variation range that is equal to ±15.8 pF. The achieved results demonstrate that the proposed interface solution is suitable for on-chip integration with different kinds of differential capacitive sensing devices, such as Micro-Electro-Mechanical-System (MEMS), force/position, and humidity sensors in biomedical and robotics applications.
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