Amorphous Ge–Sb–Se thin films were fabricated by a rf‐magnetron co‐sputtering technique employing the following cathodes: GeSe2, Sb2Se3, and Ge28Sb12Se60. The influence of the composition, determined by energy‐dispersive X‐ray spectroscopy, on the optical properties was studied. Optical properties were analyzed based on variable angle spectroscopic ellipsometry and UV‐Vis‐NIR spectrophotometry. The results show that the optical bandgap range 1.35‐2.08 eV with corresponding refractive index ranging from 3.33 to 2.36 can be reliably covered. Furthermore, morphological and topographical properties of selenide‐sputtered films studied by scanning electron microscopy and atomic force microscopy showed a good quality of fabricated films. In addition, structure of the films was controlled using Raman scattering spectroscopy. Finally, irreversible photoinduced changes by means of change in optical bandgap energy and refractive index of co‐sputtered films were studied revealing the photobleaching effect in Ge‐rich films when irradiated by near‐bandgap light under Ar atmosphere. The photobleaching effect tends to decrease with increasing antimony content.

Abstract. The paper presents the global design, fabrication and optical characterizations of pedestal waveguides and 2D microresonators made of DUV210 polymer. These particular geometries are achieved thanks to specific deep-UV lithography procedures allowing sub-lambda development