No abstract

Integration of radiofrequency microelectromechanical (RF MEMS) tuning modules into a tested planar microchamber for agile biosensing pursposes is investigated. It is found that present MEMS chips enable enhancement of the achievable sensitivity in common sensing scenarios and without adding to technological complexity, although over a relatively narrow frequency range. Dedicated RF MEMS modules with higher capacitive resolution can be prospectively employed for even more flexible performance.