Abstract.We report on our activities in design, fabrication, characterization and system integration of refractive microlens arrays for sensors and microsystems. Examples for chemical analysis systems (µTAS, blood gas sensor), neural networks and multiple pupil imaging systems for photolithography (microlens and smart mask lithography) are presented.

No abstract

A new optical concept for compact digital image acquisition devices with large field of view is developed and proofed experimentally. Archetypes for the imaging system are compound eyes of small insects and the Gabor-Superlens. A paraxial 3x3 matrix formalism is used to describe the telescope arrangement of three microlens arrays with different pitch to find first order parameters of the imaging system. A 2mm thin imaging system with 21x3 channels, 70 masculinex10 masculine field of view and 4.5mm x 0.5mm image size is optimized and analyzed using sequential and non-sequential raytracing and fabricated by microoptics technology. Anamorphic lenses, where the parameters are a function of the considered optical channel, are used to achieve a homogeneous optical performance over the whole field of view. Captured images are presented and compared to simulation results.

The stable setup of a confocal arrangement consisting of a combination of a refractive microlens and a pinhole array is presented. The focal plane of the microlenses lies at the rear surface of the substrate in the pinhole plane. By using a microscope objective one can image the stop array onto the object at a reduced size. Surface profiles of refractive and diffractive optical elements were measured with the help of this confocal microscope.

No abstract