Ferroelectrets are piezoelectric materials suitable for acoustic applications such as airborne ultrasonic transducers. Typical ferroelectrets exhibit resonance frequencies in the high kHz to low MHz range. In order to decrease the transducer resonance frequencies to the low kHz range, processes such as gas-diffusion expansion and electric charging were adjusted to cellular films which are initially twice as thick as in earlier studies. The demonstrated film expansion and electric charging lead to mechanically soft cellular structures which show high piezoelectric activities with coefficients up to 130 pC/N. Due to the simultaneously increased film thicknesses, the resonance frequencies are lowered down to about 233 kHz

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A polymer-based sensor for low frequency acceleration detection is fabricated by using microinjection molding technologies. Finite Element simulations and characterization of the sensing functionality are done. Due to an out-of-plane acceleration a force is applied to a seismic mass (length and width each 3.2 mm, thickness 1 mm), which leads to a deformation of a connected plate with dimensions of 1 mm × 1 mm × 50 ?m. Thus, charge separation at the electrodes of integrated piezoelectric polyvinylidene fluoride (PVDF) copolymer sheets occur and can be measured as sensor signal. A charge sensitivity of 0.57 pC/g is determined which is in good agreement with the simulation results. A resonance frequency of 660 Hz was measured. Furthermore, the sensor concept as well as preparation technologies to assemble a compound structure containing piezoelectric layers and the system integration by micro injection molding are discussed. In addition, different bonding techniques for the assembly of the functional components are investigated and described

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