Capacitors with a dielectric material consisting of amorphous laminates of Al2O3 and TiO2 with subnanometer individual layer thicknesses can show strongly enhanced capacitance densities compared to the bulk or laminates with nanometer layer thickness. In this study, the structural and dielectric properties of such subnanometer laminates grown on silicon by state-of-the-art atomic layer deposition are investigated with varying electrode materials. The laminates show a dielectric constant reaching 95 combined with a dielectric loss (tan δ) of about 0.2. The differences of the observed dielectric properties in capacitors with varying electrodes indicate that chemical effects at the interface with the TiN electrode play a major role, while the influence of the local roughness of the individual layers is rather limited.

Dielectrics based on amorphous sub-nanometric laminates of TiO2 and Al2O3 are subject to elevated dielectric losses and leakage currents, in large parts due to the extremely thin individual layer thickness chosen for the creation of the Maxwell–Wagner relaxation and therefore the high apparent dielectric constants. The optimization of performances of the laminate itself being strongly limited by this contradiction concerning its internal structure, we will show in this study that modifications of the dielectric stack of capacitors based on these sub-nanometric laminates can positively influence the dielectric losses and the leakage, as for example the nature of the electrodes, the introduction of thick insulating layers at the laminate/electrode interfaces and the modification of the total laminate thickness. The optimization of the dielectric stack leads to the demonstration of a capacitor with an apparent dielectric constant of 90, combined with low dielectric loss (tan δ) of 7 · 10−2 and with leakage currents smaller than 1  ×  10−6 A cm−2 at 10 MV m−1.

Electric conduction mechanisms of amorphous Al2O3/TiO2 (ATO)-laminates deposited by atomic layer deposition with sub-nanometer individual layer thicknesses were studied in a large temperature range. Two characteristic field regions are identified. In the low field region (E ≤ 0.31 MV/cm), the leakage current is dominated by the trap-assisted tunneling through oxygen vacancies occurring in the TiO2, while in the high electric field region (E > 0.31 MV/cm) the Poole Frenkel (PF) hopping is the appropriate conduction process with energy levels depending on the temperature and the electric field. It is shown that the PF potential levels decrease with the applied ATO field due to the overlapping of the Coulomb potential. Amorphous ATO-laminates show the presence of two intrinsic potential energy levels ϕi, which are 0.18 eV for low temperature region and 0.4 eV at high temperature region. Oxygen vacancies are the main origin of traps, which is consistent with the principal mechanisms for leakage in ATO-laminates.