High index immersion lithography (HIL) is one candidate for the next generation lithography technology following water immersion lithography. This technology may require only moderate changes of chip making processes and result in lower cost of ownership (CoO) compared with other technologies such as double processing, extreme ultra violet lithography (EUVL), and nano-imprinting, and other technologies. In this paper, the current status of high index lens material and immersion fluid development compared with our requirements is discussed considering microlithographic lens design feasibility and attainable NA.Keywords: High index immersion lithography, high index lens material, high index fluid, microlithographic lens

Proper tolerance control is very important in controlling product performance. This study develops a statistical tolerancing system. This system enables the quantitative analysis of optical performance, productivity, and complex tolerance sensitivity prior to manufacturing. In this paper, we report on the development of the Mass-Product Simulation System and the Complex Sensitivity Analysis System both based on Monte-Carlo methods. Furthermore, we report reliability results based on simulations. . IntroductionDetermination of tolerances is important during product manufacturing in order to maintain low cost while achieving a consistent, level of product performance. However, with optical products, precise, quantitative prediction of tolerance sensitivities, optical performance, and productivity in a mass production environment have been very difficult in the design stage. Therefore, difficulties, unanticipated in the design stage, the troubles, which can not be expected in design stage, have occurred frequently once into the production stage. This has resulted in the prolongation of the development period, and an increase in manufacturing costs for new products. The cause of these difficulties has been optical tolerance designs that have neglected or inadequately addressed errors occurring in manufacturing and assembly in the mass production stage.The purpose of this study was the development of a statistical tolerancing system for optical products based on computer simulations of the manufacturing process with the goal of increasing productivity (Virtual PT System, PT:Production Try). This system can quantitatively evaluate optical performance, productivity and tolerance sensitivity in mass production at the design stage. By using this system, the designer is able to determine the more suitable set of tolerances for a given optical product by taking into account manufacturing/assembling errors occurring in mass production.In this paper, we report on the development of a mass product simulation system and a complex sensitivity analysis system, both based on Monte-Carlo methods. Furthermore, we report on reliability results based on simulations.2. Development process and problems of SLR Lenses Figure.l shows the IDEFO of a conventional product development process for an SLR lens. IDEFO notation is well suited for analysis and representation of the process. In IDEFO notation, a square box means a function or process (call it an 'activity'). Input, output, control and mechanisms are represented by arrow SPIE Vol. 3482. 0277-786X/98/$1O.OO Downloaded From: http://proceedings.spiedigitallibrary.org/ on 06/25/2016 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

Toleranceis a very important parameter for all products to keep stable the product performance with low manufacturing cost. However in optical products, it is very difficult to predict the productivity , optical performance and complex sensitivity of tolerance for mass-production.To solve the above problems and to increase efficiency of manufacturing time and to reduce cost, This study develops the statistical tolerancing system and enables the quantitative analysis of optical performance with productivity before manufacturing. In this paper, we propose a concept of Virtual PT System (PT: Production Try)for optical products such as SLR Lenses. And we report a development of the mass product simulation system based on Monte-Carlo methods according to the proposed concept. Furthermore, we report reliability results based on simulations.

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