IGZO TFT with the same on current as n-LTPS was fabricated. The saturation on current reached 1 mA, and the off-state leakage current was below 1 pA. The Vth shift under PBT / NBT stress test for the IGZO TFT was 0.1 / 0.1 V, respectively, which was better compared to the n-LTPS. Furthermore, the IGZO TFT showed an ideal Id-Vd curve (output characteristics) without any kinks. These results indicate that, a variety of backplanes, from small size smartphones to large area TVs, are possible to be made in a single factory of IGZO.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.