-optical study of nanoscale Al-Si-truncated conical photodetector with subwavelength aperture," J. Nanophoton. 11(4), 046021 (2017), doi: 10.1117/1.JNP.11.046021.

A feasibility analysis is performed for the development and integration of a near-field scanning optical microscope (NSOM) tip–photodetector operating in the visible wavelength domain of an atomic force microscope (AFM) cantilever, involving simulation, processing, and measurement. The new tip–photodetector consists of a platinum–silicon truncated conical photodetector sharing a subwavelength aperture, and processing uses advanced nanotechnology tools on a commercial silicon cantilever. Such a combined device enables a dual-mode usage of both AFM and NSOM measurements when collecting the reflected light directly from the scanned surface, while having a more efficient light collection process. In addition to its quite simple fabrication process, it is demonstrated that the AFM tip on which the photodetector is processed remains operational (i.e., the AFM imaging capability is not altered by the process). The AFM–NSOM capability of the processed tip is presented, and preliminary results show that AFM capability is not significantly affected and there is an improvement in surface characterization in the scanning proof of concept.

A novel application of a combined and enhanced NSOM-AFM tip-photodetector system resulted in a nanoscale Polarimeter, generated by four different holes, each sharing a different shape, and enabling that the four photonic readouts forming the tip will be the four Stokes coefficients, this in order to place the polarization state in the Poincare sphere. The new system has been built on standard Atomic Force Microscope (AFM) cantilever, in order to serve as a triple-mode scanning system, sharing complementary scanning topography, optical data analysis and polarization states. This new device, which has been designed and simulated using Comsol Multi-Physics software package, consists in a Platinum-Silicon drilled conical photodetector, sharing subwavelength apertures, and has been processed using advanced nanotechnology tools on a commercial silicon cantilever. After a comparison study of drilled versus filled tips advantages, and of several optics phenomena such as interferences, the article presents the added value of multiple-apertures scanning tip for nano-polarimetry.

Detection of evanescent waves through Near-field Scanning Optical Microscopy (NSOM) has been simulated in the past, using Finite Elements Method (FEM) and 2D advanced simulations of a silicon Schottky diode, shaped as a truncated trapezoid photodetector, and sharing a subwavelength pin hole aperture. Towards enhanced resolution and next applications, the study of polarization’s influence was added to the scanning. The detector has been horizontally shifted across a vertically oriented Gaussian beam while several E-field modes, are projected on the top of the device. Both electrical and electro-optical simulations have been conducted. These results are promising towards the fabrication of a new generation of photodetector devices which can serve for Time-Spectral based Polarization-Encoding for Spatial-Temporal Super-Resolved NSOM Readout, as developed in the study.

Laser beam scanning using near-field scanning optical microscopy nanoscale silicon-based photodetector,"Abstract. As part of the efforts to enhance the near-field scanning optical microscopy and the detection of evanescent waves, a silicon Schottky diode, shaped as a truncated trapezoid photodetector and sharing a subwavelength pin-hole aperture, has been designed and simulated. Using finite elements method and two-dimensional advanced simulations, the detector has been horizontally shifted across a vertically oriented Gaussian beam, which is projected on top of the device. Both electrical and electro-optical simulations have been conducted. These results are promising toward the fabrication of a new generation of photodetector devices. © The Authors.Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.