temperature conditions where thermomechanical noise can dominate. The degree of mechanical isolation is characterized by a resonator's mechanical quality factor, Q m . Typically, Q m is defined as the ratio of energy stored in a resonator over the energy dissipated over one cycle of oscillation. Inversely, mechanical quality factors can indicate the dissipation of mechanical noise into a resonator from ambient environments. For mechanical sensors, a resonator's isolation from ambient thermal noise can greatly enhance their ability to detect ultrasmall forces, pressures, positions, masses, velocities, and accelerations. For quantum technologies, mechanical quality factor dictates the average number of coherent oscillations a nanomechanical resonator (in the quantum regime) can undergo before one phonon of thermal noise enters the resonator and causes decoherence of its quantum properties. [1] From microchip sensing to quantum networks, cryogenics are conventionally required to counteract thermal noise but enabling these burgeoning technologies to operate in ambient temperatures would have a significant impact on their widespread use.In room-temperature environments, on-chip mechanical resonators with state-of-the-art quality factors have mostly consisted of high-aspect-ratio suspended nanostructures From ultrasensitive detectors of fundamental forces to quantum networks and sensors, mechanical resonators are enabling next-generation technologies to operate in room-temperature environments. Currently, silicon nitride nanoresonators stand as a leading microchip platform in these advances by allowing for mechanical resonators whose motion is remarkably isolated from ambient thermal noise. However, to date, human intuition has remained the driving force behind design processes. Here, inspired by nature and guided by machine learning, a spiderweb nanomechanical resonator is developed that exhibits vibration modes, which are isolated from ambient thermal environments via a novel "torsional soft-clamping" mechanism discovered by the data-driven optimization algorithm. This bioinspired resonator is then fabricated, experimentally confirming a new paradigm in mechanics with quality factors above 1 billion in room-temperature environments. In contrast to other state-of-the-art resonators, this milestone is achieved with a compact design that does not require sub-micrometer lithographic features or complex phononic bandgaps, making it significantly easier and cheaper to manufacture at large scales. These results demonstrate the ability of machine learning to work in tandem with human intuition to augment creative possibilities and uncover new strategies in computing and nanotechnology.
We study a multi-resonator optomechanical system, consisting of two SiN membranes coupled to a single optical cavity mode. Correlations in the noise of the optomechanically coupled thermal baths lead to destructive interference, which we observe as a reduction in the mechanical noise power spectrum by up to 20 dB, close to the mechanical resonance frequencies. We show that this effect can be controlled by adjusting the optomechanical interaction strength between the resonators, and that it originates from the frequency shift of the optomechanically scattered photons that provide the effective mechanics-mechanics coupling. Based on this effective coupling, we also propose, derive and measure a collective effect, cooperativity competition on mechanical dissipation, which causes the optomechanically broadened linewidth of one resonator to depend on the coupling efficiency (cooperativity) of the other resonator.
State-of-the-art nanomechanical resonators are heralded as a central component for next-generation clocks, filters, resonant sensors, and quantum technologies. To practically build these technologies will require monolithic integration of microchips, resonators, and readout systems. While it is widely seen that mounting microchip substrates into a system can greatly impact the performance of high-Q resonators, a systematic study has remained elusive, owing to the variety of physical processes and factors that influence the dissipation. Here, we analytically analyze a mechanism by which substrates couple to resonators manufactured on them and experimentally demonstrate that this coupling can increase the mechanical dissipation of nanomechanical resonators when resonance frequencies of resonator and substrate coincide. More generally, we then show that a similar coupling mechanism can exist between two adjacent resonators. Since the substrate–mode coupling mechanism strongly depends on both the resonator position on the substrate and the mounting of the substrate, this work provides key design guidelines for high-precision nanomechanical technologies.
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