No abstract

Anti-reflective optical coatings made with Teflon AF2400 had the highest laser damage thresholds recorded for physical vapor deposited coatings at the Lawrence Livermore National Laboratory damage facility. Physical vapor deposited layers of Teflon AF2400, a perfluorinated amorphous polymer, Maintained the bulk optical properties of a high transmittance from 200 nm to 1200 nm, and a low refractive index. In addition, the refractive index can be intentionally reduced by control of two common deposition parameters, deposition rate and substrate temperature. Scanning electron microscopy and nuclear magnetic resonance observations indicated that morphological changes caused the variations in the refractive index rather than compositional changes. The coatings adhered to fused silica and silicon wafers under normal laboratory handling conditions.

This documentwas preparedas an accountof work sponsoredby an agencyof the United StatesGovernment.Neitherthe United StatesGovernmentnor the University of California nor an)' of their employees°makes,anywarranty,expressor implied, or assumes an) legal liahilily or responsibilityfor the accuracy, completeness, or u._fulnessof an) information,apparatu_ product,or processdi_losed, or represents that its use wouldnot infringe privatelyowned rights. Referenceherein to an) specific commercialproducts, process, or _rvice by trade name.trademark, manufacturer, or other_i_, doesnotnecessarilyconstituteor imply its endorsement,recommendation. or favoring by the United States Government or the University of California. The views and opinions of authors expres_d herein do not necessaril) state or reflect those of the United States Government or the University of California. and shall not be used for adverti_;ingor product endor_ment purposes.

Anti-reflective (AR) and high reflector (HR) optical coatings were made by physical vapor deposition (PVD) of Teflon AF2400, a perfluorinated amorphous polymer. The AR had the highest laser damage thresholds recorded for PVD coatings at the Lawrence Livermore National Laboratory (LLNL) damage facility. The HR was a multilayer of ZnS and AF2400. The bandwidth was 550 nm, centered at 1064 nm. Single layers of Teflon AF2400 deposited by PVD were characterized optically. The refractive index could be intentionally reduced below the bulk value by varying either deposition rate or substrate temperature. Scanning electron microscopy and nuclear magnetic resonance observations indicated that morphological changes caused the variations in the refractive index rather than compositional changes. SPIE Vol. 2253 /513 Downloaded From: http://proceedings.spiedigitallibrary.org/ on 06/15/2016 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx