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In this work, the fabrication of a porous silicon Bragg reflector and vertical cavity on P+ silicon substrate is investigated for applications in spectroscopic sensing in the mid-infrared (Mid-IR) wavelength range. The complex refractive index of porous silicon layers is measured. Optical vertical devices are then fabricated and characterized by Fourier transform infrared (FTIR) spectrophotometry. This work demonstrates the use of electrochemically prepared Bragg reflectors with reflectance as high as 99% and vertical cavity based on porous silicon layers operating in the mid-IR spectral region (up to 8 µm). Experimental reflectance spectra of the vertical cavity structures are recorded as a function of air exposure duration after thermal annealing under nitrogen flux (N2) and results demonstrate that these structures could be used for spectroscopic sensing applications in the mid-IR (2-8 µm) by grafting specific biomolecules on the porous silicon internal surface.

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