Abstract. Compliant mechanisms in precision weighing technology are highly sensitive mechanical systems with continuously rising demands for performance in terms of resolution and measurement uncertainty. The systematic combination of adjustment measures represents a promising option for the enhancement of weighing cells which is not yet fully exhausted. A novel adjustment concept for electromagnetic force compensated weighing cells designed for 1 kg mass standards is introduced. The effect on the mechanical behavior is analyzed in detail using a planar compliant mechanism with semi-circular flexure hinges. Design equations for a first layout of the mechanical system are derived from a linearized rigid body model. Existing adjustment concepts for the stiffness characteristic and the sensitivity to quasi-static ground tilt are included. They are extended by the novel approach to attach trim weights to the levers of the linear guide. Based on this concept, an optimal design for the weighing cell is determined. The comparison with a finite element model reveals further effects given by the more precise description of the mechanical behavior. By parametric studies of the adjustment parameters in the mechanical models, it is shown that the stiffness and tilt sensitivity can be reduced significantly compared to the non-adjusted weighing cell. The principal correlation of the trim weights and their effect on the mechanical properties is experimentally verified using a commercially available weighing cell.

Compliant mechanisms based on flexure hinges are widely used in precision engineering applications. Among those are devices such as precision balances and mass comparators with achievable resolutions and uncertainties in the nano-newton range. The exact knowledge of the mechanical properties of notch hinges and their modeling is essential for the design and the goal-oriented adjustment of these devices. It is shown in this article that many analytical equations available in the literature for calculating the bending stiffness of thin semi-circular flexure hinges cause deviations of up to 12% compared to simulation results based on the three-dimensional finite element model for the considered parameter range. A close examination of the stress state within the loaded hinge reveals possible reasons for this deviation. The article explains this phenomenon in detail and shows the limitations of existing analytical models depending on specific geometric ratios. An accurate determination of the bending stiffness of semi-circular flexure hinges in a wide range of geometric parameters without the need for an elaborate finite element analysis is proposed in form of FEM-based correction factors for analytical equations referring to Euler-Bernoulli’s beam theory.

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Abstract. This paper describes the new adjustment concept of novel planar, monolithic, high-precision electromagnetic force compensation weighing cells. The concept allows the stiffness and the tilt sensitivity of the compliant mechanisms that are dependent on the nominal load on the weighing pan to be adjusted to an optimum. The new mechanism is set up and adjusted according to the developed mechanical model. For evaluation of the concept the system is tested on a high-precision tilt table and under high vacuum conditions in the environment of a commercially available mass comparator.