Six European National Measurement Institutes (NMIs) have joined forces within the European Metrology Research Programme funded project NANOTRACE to develop the next generation of optical interferometers having a target uncertainty of 10 pm. These are needed for NMIs to provide improved traceable dimensional metrology that can be disseminated to the wider nanotechnology community, thereby supporting the growth in nanotechnology. Several approaches were followed in order to develop the interferometers. This paper briefly describes the different interferometers developed by the various partners and presents the results of a comparison of performance of the optical interferometers using an x-ray interferometer to generate traceable reference displacements.

X-ray interferometry is emerging as an important tool for dimensional nanometrology both for sub-nanometre measurement and displacement. It has been used to verify the performance of the next generation of displacement measuring optical interferometers within the European Metrology Research Programme project NANOTRACE. Within this project a more detailed set of comparison measurements between the x-ray interferometer and a dual channel Fabry–Perot optical interferometer (DFPI) have been made to demonstrate the capabilities of both instruments for picometre displacement metrology. The results show good agreement between the two instruments, although some minor differences of less than 5 pm have been observed.

Abstract-We present a probabilistic framework for the mathematical expression recognition problem. The developed system is flexible in that its grammar can be extended easily thanks to its graph grammar which eliminates the need for specifying rule precedence. It is also optimal in the sense that all possible interpretations of the expressions are expanded without making early commitments or hard decisions. In this paper, we give an overview of the whole system and describe in detail the graph grammar and the parsing process used in the system, along with some preliminary results on character, structure and expression recognition performances.

No abstract

No abstract