The complex magnetic field of the permanent-magnet electron cyclotron resonance (ECR) ion source MEFISTO located at the University of Berne have been numerically simulated. For the first time the magnetized volume qualified for electron cyclotron resonance at 2.45 GHz and 87.5 mT has been analyzed in highly detailed 3D simulations with unprecedented resolution. New results were obtained from the numerical simulation of 25211 electron trajectories.The evident characteristic ion sputtering trident of hexapole confined ECR sources has been identified with the field and electron trajectory distribution. Furthermore, unexpected long electron trajectory lifetimes were found.

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a b s t r a c tThe magnetic field of the permanent magnet electron cyclotron resonance (ECR) ion source SWISSCASE located at the University of Bern has been numerically simulated and experimentally investigated. For the first time the magnetized volume qualified for electron cyclotron resonance at 10.88 GHz and 388.6 mT has been analyzed in highly detailed 3D simulations with unprecedented resolution. The observed pattern of carbon coatings on the source correlates strongly with the electron and ion distribution in the ECR plasma of SWISSCASE. Under certain plasma conditions the ion distribution is tightly bound to the electron distribution and can considerably simplify the numerical calculations in ECR related applications such as ECR ion engines and ECR ion implanters.