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Shape-memory actuators allow machines ranging from robots to medical implants to hold their form without continuous power, a feature especially advantageous for situations where these devices are untethered and power is limited. Although previous work has demonstrated shape-memory actuators using polymers, alloys, and ceramics, the need for micrometer-scale electro–shape-memory actuators remains largely unmet, especially ones that can be driven by standard electronics (~1 volt). Here, we report on a new class of fast, high-curvature, low-voltage, reconfigurable, micrometer-scale shape-memory actuators. They function by the electrochemical oxidation/reduction of a platinum surface, creating a strain in the oxidized layer that causes bending. They bend to the smallest radius of curvature of any electrically controlled microactuator (~500 nanometers), are fast (<100-millisecond operation), and operate inside the electrochemical window of water, avoiding bubble generation associated with oxygen evolution. We demonstrate that these shape-memory actuators can be used to create basic electrically reconfigurable microscale robot elements including actuating surfaces, origami-based three-dimensional shapes, morphing metamaterials, and mechanical memory elements. Our shape-memory actuators have the potential to enable the realization of adaptive microscale structures, bio-implantable devices, and microscopic robots.

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We present a platform for parallel production of standalone, untethered electronic sensors that are truly microscopic, i.e., smaller than the resolution of the naked eye. This platform heterogeneously integrates silicon electronics and inorganic microlight emitting diodes (LEDs) into a 100-μm-scale package that is powered by and communicates with light. The devices are fabricated, packaged, and released in parallel using photolithographic techniques, resulting in ∼10,000 individual sensors per square inch. To illustrate their use, we show proof-of-concept measurements recording voltage, temperature, pressure, and conductivity in a variety of environments.

Autonomous robots—systems where mechanical actuators are guided through a series of states by information processing units to perform a predesigned function—are expected to revolutionize everything from health care to transportation. Microscopic robots are poised for a similar revolution in fields from medicine to environmental remediation. A key hurdle to developing these microscopic robots is the integration of information systems, particularly electronics fabricated at commercial foundries, with microactuators. Here, we develop such an integration process and build microscopic robots controlled by onboard complementary metal oxide semiconductor electronics. The resulting autonomous, untethered robots are 100 to 250 micrometers in size, are powered by light, and walk at speeds greater than 10 micrometers per second. In addition, we demonstrate a microscopic robot that can respond to an optical command. This work paves the way for ubiquitous autonomous microscopic robots that perform complex functions, respond to their environments, and communicate with the outside world.