Excellent passivation properties of hydrogenated amorphous silicon oxide (a-SiOx:H) prepared by very high frequency plasma-enhanced chemical vapor deposition (VHF PECVD) at a low substrate temperature (170 °C) on crystalline and polycrystalline silicon (Si) wafers are reported. Films were characterized by ellipsometry, Fourier transform infrared spectroscopy (FTIR), ultraviolet–visible (UV–vis) spectrophotometry, and dark-conductivity and photoconductivity measurements. A comparison of the results with those for different passivation layers such as hydrogenated amorphous silicon carbon nitride (a-SiCxNy:H), hydrogenated amorphous silicon nitride (a-SiNx:H), and hydrogenated amorphous silicon (a-Si:H) reveals their superiority as an excellent passivation layer for p-type crystalline Si as well as polycrystalline Si. A maximum effective lifetime of 400 µs was measured for 1–10 Ω cm, 380-µm-thick p-type c-Si using a micro-photocurrent decay (µ-PCD) system. Fixed charge density (Qf) was estimated by high-frequency (1 MHz) capacitance–voltage measurement using a metal–insulator–silicon structure (CV-MIS). The effect of annealing temperature on surface passivation in a nitrogen atmosphere was also studied.

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It is shown that the Lorentz condition can be discarded on potentials by introduction of an electric scalar field into the Maxwell's equations. This results in the appearance of space-charge and current fluctuations in the vacuum. These extra charges, unlike the usual charges, are time-dependent in nature. The non-conserved part of the charge density then causes production of the electric scalar field which further contributes to the electric and magnetic vector fields. This contribution then makes it possible to create an ideal square wave electric vector field from an exponentially rising and decaying charge.

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We deposited a-SiCN:H films by HWCVD using a gas mixture of hexamethyldisilazane, H2 and N2, and fabricated cast polycrystalline silicon solar cells with the a-SiCN:H passivation and anti-reflection layer. N2 addition led to the reduction of the refractive index of the a-SiCN:H films due to the increase in nitrogen concentration of the films. This improved performance of the antireflection layer. The advantage of adding N2 to the process was demonstrated by the improvement in short circuit current (JSC) and efficiency of cast polycrystalline silicon solar cells. At present, the efficiency of cast polycrystalline silicon solar cell using a-SiCN:H film as a passivation layer reached 14.2%.