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Articles you may be interested inResonance effects in photoemission from TiO2-capped Mo/Si multilayer mirrors for extreme ultraviolet applications

Differently prepared Ru-capping layers, deposited on Mo/Si EUV multilayers, have been characterized using a suite of metrologies to establish their baseline structural, optical, and surface properties in as-deposited state. Same capping layer structures were tested for their thermal stability and oxidation resistance. Post-mortem characterization identified changes due to accelerated tests. The best performing Ru-capping layer structure was studied in detail with transmission electron microscopy to identify the grain microstructure and texture. This information is essential for modeling and performance optimization of EUVL multilayers.

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Transmission measurements of niobium and zirconium at both extreme-ultraviolet (EUV) and ultraviolet, visible, and near infrared (UV/Vis/NIR) wavelengths are presented. Thin foils of various thicknesses mounted on nickel mesh substrates were measured, and these data were used to calculate the optical constants δ and β of the complex refractive index n = 1-δ +iβ. β values were calculated directly from the measured transmittance of the foils after normalizing for the nickel mesh. The average β values for each set of foils are presented as a function of wavelength. The real (dispersive) part of the refractive index, δ was then calculated from Kramers-Kronig analysis by combining these β values with those from previous experimental data and the atomic tables.