In this work, titanium nitride (TiN) nanorod arrays were fabricated using glancing angle deposition in a magnetron sputtering system. The deposition parameters, including the bias on the substrate and the flow rate of nitrogen, were varied to deposit various TiN nanorod arrays. Before glancing angle deposition was conducted, uniform TiN films were deposited and their permittivity spectra, for various deposition parameters, were obtained. The effect of the deposition parameters on the morphology of the nanorods is analyzed here. The polarization-dependent extinctance spectra of TiN nanorod arrays were measured and compared. Extinction, which corresponds to the longitudinal mode of localized surface plasmon resonance, can be significantly changed by tuning the N2 flow rate and substrate bias voltage during deposition.

Silver nano-rod, nano-zigzag, nano-saw, and nano-particle arrays are fabricated with glancing angle bideposition. The structure-dependent anisotropic optical properties of those bideposited nanostructured arrays are measured and investigated. The equivalent birefringence values of nano-rod and nano-zigzag arrays are much larger than crystals found in nature and liquid crystal used in display products. The fact that induced localized plasmon-magnetic field between nanorods dominates the strong phase retardation between p-polarized and s-polarized transmitted wave. For the nano-saw, the strong localized electric field induced between the saw teeth leads to strong SERS signals. Although the bideposited nanoparticles own weak morphological anisotropy, strong optical phase retardation is still detected at wavelengths near 400 nm.

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