A two-axis scanning catheter was developed for 3D endoscopic imaging with spectral domain optical coherence tomography (SD-OCT). The catheter incorporates a micro-mirror scanner implemented with microelectromechanical systems (MEMS) technology: the micro-mirror is mounted on a two-axis gimbal comprised of folded flexure hinges and is actuated by magnetic field. The scanner can run either statically in both axes or at the resonant frequency (>= 350Hz) for the fast axis. The assembled catheter has an outer diameter of 2.8 mm and a rigid part of 12 mm in length. Its scanning range is ± 20˚ in optical angle in both axes with low voltages (1~3V), resulting in a scannable length of approximately 1 mm at the surface in both axes, even with the small catheter size. The catheter was incorporated with a multi-functional SD-OCT system for 3D endoscopic imaging. Both intensity and polarization-sensitive images could be acquired simultaneously at 18.5K axial scans/s. In vivo 3D images of human fingertips and oral cavity tissue are presented as a demonstration. Fujimoto, "Scanning single-mode fiber optic catheter-endoscope for optical coherence tomography," Opt. Lett. 21, 543-545 (1996). 26. B. E. Bouma and G. J. Tearney, "Power-efficient nonreciprocal interferometer and linear-scanning fiberoptic catheter for optical coherence tomography," Opt. Lett. 24, 531-533 (1999).

We have fabricated polycrystalline diamond hemispheres by hot-filament CVD (HFCVD) in spherical cavities wet-etched into a high temperature glass substrate CTE matched to silicon. Hemispherical resonators 1.4 mm in diameter have a Q of up to 143 000 in the fundamental wineglass mode, for a ringdown time of 2.4 s. Without trimming, resonators have the two degenerate wineglass modes frequency matched as close as 2 Hz, or 0.013% of the resonant frequency (~16 kHz). Laser trimming was used to match resonant modes on hemispheres to 0.3 Hz. Experimental and FEA energy loss studies on cantilevers and hemispheres examine various energy loss mechanisms, showing that surface related losses are dominant. Diamond cantilevers with a Q of 400 000 and a ringdown time of 15.4 s were measured, showing the potential of polycrystalline diamond films for high Q resonators. These resonators show great promise for use as hemispherical resonant gyroscopes (HRGs) on a chip.

In this paper we report the fabrication of hemispherical polycrystalline diamond resonators fabricated on a novel high-temperature glass substrate. The hemispherical resonator gyroscope is one of the most accurate and rugged of the mechanical gyroscopes, and can be operated in either rate or whole-angle mode due to its high degree of symmetry. A fabrication sequence for creating extremely symmetric 3D MEMS hemispheres is presented. Mode shapes and frequencies obtained with a laser vibrometer are shown, as well as curves of Q versus pressure, and the dependence of frequency on anchor size. Fundamental mode frequency matching to <0.1% in as-fabricated devices has been achieved, which is essential to gyroscope operation in whole-angle mode.

No abstract

No abstract