In this paper we present our work on three silicon waveguide structures that are suitable for three different wavelength regions: near-, mid-and far-infrared. Design rules for standard rib SOI waveguides are given. Both single mode and polarisation independence in these waveguides are discussed. A hollow core waveguide suitable for gas sensing applications in the mid-infrared wavelength region is also analysed. Finally, fabrication and experimental results for free standing waveguides, which may find application in the mid and perhaps far-infrared wavelength region, are presented.

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