Piezoelectric actuators are commonly used for nanopositioning due to their high resolution, low power consumption and wide operating frequency, but they suffer hysteresis, which affects linearity. In this paper, a novel digital charge amplifier is presented. Results show that hysteresis is reduced by 91% compared with a voltage amplifier, but over long operational periods the digital charge amplifier approach suffers displacement drift. A non-linear ARX model with long-term accuracy is used with a data fusion algorithm to remove the drift. Experimental results are presented.
Piezoelectric actuators are the most commonly used actuators in nanopositioning. They provide excellent operating bandwidth and precision. These actuators are normally driven by voltage amplifiers; however, the relationship of the applied voltage on the actuator and its position is nonlinear and complex due to phenomena such as hysteresis. This adversely influences actuator’s position control which is the core component of nanopositioning. However, the electrical charge applied on a piezoelectric actuator has a significantly less complex relationship with its position. As a result, driving piezoelectric actuators with charge amplifiers has attracted significant attention. In this article, charge driving methods are classified, and their advantages, major issues and the solutions to these issues are critically reviewed.
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