In designing the fluidic based pressure sensor, the shape of the membrane is important in order to obtain maximum performance. The material used and the liquid inside the sensor is also important and deserve proper consideration. . In this work, the analysis of the membrane, materials and liquid using finite element analysis (FEA) are presented. The FEA simulation of the different shapes including square and rectangular shapes were carried out. The applied pressure and the dimension of selected membrane were varied in order to study the membrane performance.The result shows that the square shape produced the highest displacement of 4.7 mm compared to the other shapes. In terms of dimension, maximum performance can be achieved with a large area of membrane facing the applied pressure. The different types of membrane material andliquids that were used were also discussed. Two commonly used materials, Polyimide (PI) and Polydimethylsiloxane (PDMS) were chosen for this analysis. As for the liquids, methanol and propolyne carbonate were used.

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This paper presents the analysis of the capacitive based flow sensor using computational fluid dynamic (CFD) and mathematical equation approach. The CFD simulations for different types of sensor structure were carried out. Pressure and velocity of the fluid were varied in order to study the hydrodynamic parameter such as displacement and drag force. For the coplanar electrode, width of electrode and half gap between electrodes were varied for capacitive response using mathematical approach. Based on the simulation, the displacement of the dome increases as the pressure increases. The result shows that the most suitable thickness of the dome is 0.1 mm based on the displacement and the strain. Meanwhile for the coplanar electrode, the width and half gap showed a significant effect on the capacitance response.