Here, we report a novel method of micropatterning oligonucleotides via aromatic groups as linkers on partially amino-terminated diamond and the inherence on subsequent hybridization. The covalent immobilization of probe oligonucleotides and characterization of immobilized probe oligonucleotides with carboxylic compounds were investigated by X-ray photoelectron spectroscopy (XPS). To confirm the effects of linker flexibility in a low amino group on diamond for probe oligonucleotides, three kinds of dicarboxylic compound--adipic acid, terephthalic acid, and trimesic acid--were used for immobilization of probe oligonucleotides, like linkers; and these oligonucleotides were hybridized with target oligonucleotides labeled with Cy 5 on the micropatterned diamond surface. The hybridization intensities determined by epifluorescence microscopy were compared and analyzed.

The enzyme sensors using electrolyte-solution-gate diamond field effect transistors (SGFETs) have been developed for the first time. The hydrogen-terminated surface channel of the FETs was modified into partially aminated and oxygen-terminated (H-A-O-terminated) with irradiation of ultraviolet in an ammonia environment. The pH response of that is obtained about 50 mV/pH at pH 2–10. The concentration of substrates (urea or glucose) in the electrolyte solution has been detected by the pH change due to the bio-catalyzed effect of enzyme (urease or glucose oxidase), which is immobilized on the channel of SGFETs. The sensitivity of urea and glucose is approximately 30 mV/decade and 20 mV/decade respectively.

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Microelectromechanical systems (MEMS) vibratory gyroscopes are used in a wide range of applications. Gyroscopes which have long-term stability and high-reliability even when they are used in harsh environments such as in a wide range of temperatures will be useful for automotive systems and robotics applications.We report a deformation-robust gyroscope, which has three sets of symmetrically arranged folded beams (SAF), which cancel and/or dissipate deformation or internal stress over a wide range of temperatures. In addition, we found that a triangularly supported one-sided open frame by the SAF separated spurious modes from the drive and sensing modes.

We developed a wafer-level two-step anodic bonding process for a combined sensor with two different pressure chambers: ambient and low vacuum pressure. This two-step bonding process features: a bonding and non-bonding area controlled with a glass bump array, an anodic bonding process with plastic deformation of the glass bumps at high temperature and high loading, and two different pressure chambers formed with a sequence of bonding processes.