This study aims to systematically review and analyze the results of research on CIPP and kirkpatrick models in the evaluation of phisycs teacher competency development programs. This literature review is specifically intended to determine the advantages and disadvantages of both evaluation models in the implementation of program evaluation. The research method uses systematic studies through four stages, namely; identification, selection, feasibility and inclusion. Search articles using the Google Scholar, ERIC, Sciencedirect and SpringerLink databases. Based on the results of the study found 1115 research articles that discuss the use of CIPP and Kirkpatrick models in the evaluation of competency development programs. The articles are mostly published in the form of proceedings and international journals and research comes from several countries. The final results showed there were 18 studies discussing the use of CIPP and Kirkpatrick models to evaluate competency development and training programs. Recommendations of the results of the study, in order to be able to combine two models namely CIPP and Kirkpatrick as an alternative evaluation model, the goal is to get an overview of the results of the evaluation of phisycs teacher competency development programs more comprehensively especially in the program that contains training components.