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Beam techniques for the surface analysis of solids [e.g., electron spectroscopy for chemical analysis (ESCA), Auger electron spectroscopy (AES), analytical electron microscopy (AEM), low energy ion scattering (LEIS), Rutherford backscattering (RBS), and secondary ion mass spectrometry (SIMS)], are based on the interaction of beams of photons, electrons, or ions, respectively, with a solid and the detection of the resulting information-carrying beams of photons, electrons, or ions. With these methods the chemical composition of the solid, across the sample surface and in depth (concentration profile) can be determined. A large number of artifacts may be introduced in any type of sample. In nonideal systems, such as glass and ceramic samples, additional difficulties can be introduced (A) by the poor electrical conductivity: charging of the sample occurs, leading to (a) deterioration and even a complete suppression of the spectra, (b) loss in lateral resolution in the imaging mode, and (c) migration of mobile ions in the sample and (B) by the extreme thin interfaces in polycrystalline materials which require the use of techniques with lateral resolution down to the 5 nm range. Mechanisms which lead to a deterioration of the spectra and procedures to overcome them will be discussed, followed by examples for the successful analysis of glasses and ceramics.