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The effect on the metallurgical structure and wear behavior of Al-Si alloy and steel produced by nitrogen ion implantation and ion beam mixing deposition (simultaneous nitrogen ion implantation and Ti vapor deposition) using an ion beam source were studied.A combination of X-ray diffraction, Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS) was used to determine the metallurgical structure and chemical composition, and to investigate.The chemical bonding state of the ion treated surfaces.X-ray diffraction data showed that TiN films were formed at room temperature by ion beam mixing treatment.It is demonstrated, that a mixing layer was observed between the substrate and TiN film.AlN was observed when nitrogen ions were implanted in Al-Si alloy. The pin-on disk wear test showed a decrease in the coefficient of friction and an increase in wear resistance for surface treated by both nitrogen ion implantation and ion beam mixing.

A new machine has been made for practical metal surface treatment with simultaneous ion implantation and metal vapor deposition (dynamic mixing) by using a high current ion source. The machine has a bucket-type ion source, electron beam evaporator, water-cooled rotary specimen holder, and film thickness monitor. The ion energy is variable in the region 4–40 kV and the total beam current for nitrogen is over 600 mA. The beam diameter is about 10 cm. The machine has no magnet for mass analysis. The power supply of the ion source has a high voltage, high speed switch for the gate turn-off thyrister to protect and improve the ion source capability by conditioning. The machine was applied to surface treatment of an aluminum alloy at room temperature and improved wear resistance was obtained for the samples.

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