Microfluidics refers to manipulation, precise control, and behavior of fluids at the micro and nanoliter scales. It has entered the realm of science as a way to precisely measure or mix small amounts of fluid to perform highly controlled reactions. Glass and polydimethylsiloxane (PDMS) are common materials used to create microfluidic devices; however, glass is difficult to process and PDMS is relatively hydrophobic. In this study, SU-8, an epoxy based (negative) photoresist was used to create various electrokinetic microfluidic chips. SU-8 is commonly used in microelectromechanical design. Spin coating of various SU-8 formulations allows for 1 µm to 100 µm thick layers with aspect ratios reportedly as high as 50:1. Case studies were performed to understand the curing/crosslinking process of SU-8 by differential scanning calorimetry. Supplier (MicroChem) recommended parameters were then altered to allow for adequate development of microfluidic channels, while maintaining enough molecular mobility to subsequently bond the SU-8 to a secondary substrate. Three SU-8 layers were used to create fully (SU-8) enclosed microfluidic channels. An (1) SU-8 2050 fully cured base layer was used as a platform on silicon to build from, (2) an SU-8 2050 partially cured layer for developing microfluidic channels , and (3) an SU-8 2007 uncured layer for bonding a secondary substrate to enclose the microfluidic channels. Bond quality was verified by optical and scanning electron microscopy, which resulted in a nearly 100% bond with little to no reflow of SU-8 into channels. Working pressures (ΔP across the capillary) of 15.57 lb/in 2 (max detection) were obtained with no fluid leaks.
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