Scanning tunneling electroluminescence (STL) microscopy is performed on a 3 nm‐thick InGaN/GaN quantum well (QW) with [In] = 0.23 such that the main light emission occurs in the green. The technique is used to map the radiative recombination properties at a scale of a few nanometers and correlate the local electroluminescence map with the surface topography simultaneously imaged by scanning tunneling microscopy. While the expected green emission is observed all over the sample, measurements performed on a 500 nm × 500 nm area around a 150 nm‐large and 2.5 nm‐deep hexagonal defect reveal intense emission peaks at higher energies close to the defect edges, features which are not visible in the macrophotoluminescence spectrum of the sample. Via a fitting of the local tunneling electroluminescence spectra, quantitative information on the fluctuations of the intensity, peak energy, width, and phonon replica intensity of the different spectral contributions is obtained, which provides information on carrier localization in the QW. This procedure also indicates that the carrier diffusion length on the probed area of the QW is shorter than 50 nm.

Scanning tunneling luminescence microscopy (STLM) and scanning tunneling spectroscopy (STS) are used to study step‐bunched, oxidized 4H‐SiC surfaces prepared using a silicon melt process. The step‐bunched surface consists of atomically smooth terraces parallel to [0001] crystal planes, and rougher risers containing nanoscale steps formed by the termination of these planes. The striking topography of this surface is well resolved with large tip biases around −8 V and set currents less than 1 nA. Hysteresis in the STS spectra is preferentially observed on risers, suggesting that they contain a higher density of surface charge traps than the terraces where hysteresis is more frequently absent. Similarly, intense sub‐gap light emission centered around 2.4 eV is observed mainly on the risers albeit only with larger tunneling currents equal to or greater than 10 nA. The surface‐oxide‐related origin of this emission is reinforced by comparing tunneling electroluminescence spectra on the 4H‐ and 6H‐polytypes, and by the observation of a drastic reduction in emitted intensity after removal of the oxide in buffered HF. These results demonstrate the capability of STLM for the observation of surface impurities and defects responsible for sub‐gap light emission with spatial resolutions approaching the length scale of the defects themselves.