Recently published reports in the literature for bilayer lift-off processes have described recipes for the patterning of metals that have recommended metal-ion-free developers, which do etch aluminum. We report the first measurement of the dissolution rate of a commercial lift-off resist (LOR) in a sodium-based buffered commercial developer that does not etch aluminum. We describe a reliable lift-off recipe that is safe for multiple process steps in patterning thin (<100 nm) and thick aluminum devices with micron-feature sizes. Our patterning recipe consists of an acid cleaning of the substrate, the bilayer (positive photoresist/LOR) deposition and development, the sputtering of the aluminum film along with a palladium capping layer and finally, the lift-off of the metal film by immersion in the LOR solvent. The insertion into the recipe of postexposure and sequential develop-bake-develop process steps are necessary for an acceptable undercut. Our recipe also eliminates any need for accompanying sonication during lift-off that could lead to delamination of the metal pattern from the substrate. Fine patterns were achieved for both 100-nm-thick granular aluminum/palladium bilayer bolometers and 500-nm-thick aluminum gratings with 6-μm lines and 4-μm spaces. Wilson, Korolev, and Crow: Bilayer lift-off process for aluminum metallization Downloaded From: http://nanolithography.spiedigitallibrary.org/ on 05/15/2015 Terms of Use: http://spiedl.org/terms Wilson, Korolev, and Crow: Bilayer lift-off process for aluminum metallization Downloaded From: http://nanolithography.spiedigitallibrary.org/ on 05/15/2015 Terms of Use: http://spiedl.org/terms
Limb length inequality is a potentially disabling condition with few noninvasive treatment options. Our lab has previously shown that unilateral heat increases bone elongation rate, suggesting that temperature therapy could be a non‐surgical way to promote limb length equalization. Treatment age is important because we have shown that temperature effects occur primarily when growth is most rapid. We compared heat effects on limb lengthening during early (3‐5 weeks age) and late (5‐7 weeks age) phases of post‐weaning growth in mice (N=24). We tested the hypothesis that heat‐induced limb elongation varies with postnatal growth rate. Female mice (N=6 per age) were treated with 40C unilateral heat for 40 minutes per day for 14 days. Controls (N=6 per age) were not treated. Tibial elongation rate, measured by fluorochrome labeling, was over two‐fold greater during the early phase. Bone elongation rate reflected overall body growth rate, with lower absolute heat‐induced differences during the later phase. Relative increases in extremity length on the heat‐treated side were similar during early and late phases, suggesting that a heat‐induced growth response is still possible during later postnatal growth. These results are important for designing therapies to treat children with linear growth disorders at different stages of development by demonstrating that treatments may not be restricted to early growth phases. Supported by ASBMR GAP, WV‐NASA, UK‐CCTS (NIH UL1TR000117), and NIH/NIAMS R15AR067451‐01.
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