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Titanium dioxide(TiO2) is a well-known material which is non-toxic with efficient photoactivity, high stability, low-cost and corrosion-resistant. Up to today’s technology, TiO2 films are coated for various applications in the scientific area. In this study, bilayer TiO2 films were coated on indium tin oxide(ITO) layers that have different characteristic properties. The devices designed as homemade of Direct Current Magnetron Sputtering (DCMS) and Spray Pyrolysis Deposition (SPD) coating methods were used to coat the first and second layers of bilayer TiO2 films, respectively. The optical and crystalline characterizations of bilayer TiO2 films were analyzed by UV-VIS spectroscopy and XRD techniques. The XPS spectrum showed that O2 molecules simply oxidize from Ti3+ to Ti4+ after SPD coating method. The characterization results of TiO2 films showed change in optical band gap value and crystalline structure of TiO2 bilayer.

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