Magnetic sensing is present in our everyday interactions with consumer electronics and demonstrates the potential for the measurement of extremely weak biomagnetic fields, such as those of the heart and brain. In this work, we leverage the many benefits of microelectromechanical system (MEMS) devices to fabricate a small, low-power, and inexpensive sensor whose resolution is in the range of biomagnetic fields. At present, biomagnetic fields are measured only by expensive mechanisms such as optical pumping and superconducting quantum interference devices (SQUIDs), suggesting a large opportunity for MEMS technology in this work. The prototype fabrication is achieved by assembling micro-objects, including a permanent micromagnet, onto a postrelease commercial MEMS accelerometer using a pick-and-place technique. With this system, we demonstrate a room-temperature MEMS magnetic gradiometer. In air, the sensor's response is linear, with a resolution of 1.1 nT cm −1 , spans over 3 decades of dynamic range to 4.6 µT cm −1 , and is capable of off-resonance measurements at low frequencies. In a 1 mTorr vacuum with 20 dB magnetic shielding, the sensor achieves a 100 pT cm −1 resolution at resonance. This resolution represents a 30-fold improvement compared with that of MEMS magnetometer technology and a 1000-fold improvement compared with that of MEMS gradiometer technology. The sensor is capable of a small spatial resolution with a magnetic sensing element of 0.25 mm along its sensitive axis, a >4-fold improvement compared with that of MEMS gradiometer technology. The calculated noise floor of this platform is 110 fT cm −1 Hz −1/2 , and thus, these devices hold promise for both magnetocardiography (MCG) and magnetoencephalography (MEG) applications.

Electrical detection of messenger ribonucleic acid (mRNA) is a promising approach to enhancing transcriptomics and disease diagnostics because of its sensitivity, rapidity, and modularity. Reported here is a fast SARS-CoV-2 mRNA biosensor (<1 min) with a limit of detection of 100 aM and a linear sensitivity of 22 mV per molar decade. These figures of merit were obtained on photoresistlessly patterned monolayer graphene/SiO2 field-effect transistors (FETs) derived from commercial four-inch graphene on 90 nm of silicon dioxide on p-type silicon. Then, to facilitate mRNA hybridization, graphene sensing mesa were coated with an ultrathin sub-percolation threshold gold film for bonding 3′-thiolated single-stranded deoxyribonucleic acid (ssDNA) probes complementary to the SARS-CoV-2 nucleocapsid phosphoprotein (N) gene. Sub-percolated gold was used to minimize the distance between the graphene material and surface hybridization events. The liquid-transfer characteristics of the graphene/SiO2 FETs repeatedly shows correlation between the Dirac voltage and the copy number of polynucleotide. Ultrathin percolated gold films on graphene FETs facilitate two-dimensional electron gas (2DEG) mRNA biosensors for transcriptomic profiling.

Standard physical vapor deposition systems are large, expensive, and slow. As part of an on-going effort to build a fab-on-a-chip, we have developed a chip-scale, low cost, fast physical vapor deposition system designed to be used with atomic calligraphy or dynamic stencil lithography to direct write nanostructures. The system comprises two MEMS devices: a chip-scale thermal evaporator and a mass sensor that serves as a film thickness monitor. Here, we demonstrate the functionality of both devices by depositing Pb thin-films. The thermal evaporator was made by fabless manufacturing using the SOIMUMPs processs (MEMSCAP, inc). It turns on in 1:46 s and reaches deposition rates as high as 7.2Å s −1 with ∼ 1 mm separation from the target. The mass sensor is a re-purposed quartz oscillator (JTX210) that is commercially available for less than one dollar. Its resolution was measured to be 2.65 fg or 7.79E-5 monolayers of Pb.[2020-0237] Index Terms-Physical vapor deposition (PVD), evaporation, fab-on-a-chip, MEMS, mass sensor, quartz oscillator, film thickness monitor, phased locked loop.

Standard physical vapor deposition systems are large, expensive, and slow. As part of an on-going effort to build a fab-on-a-chip, we have developed a chip-scale, low cost, fast physical vapor deposition system consisting of two MEMS devices: a chip-scale thermal evaporator and a mass sensor that serves as a film thickness monitor. Here, we demonstrate the functionality of both devices by depositing Pb thin-films. The thermal evaporator was made by fabless manufacturing using the SOIMUMPs processs (MEMSCAP, inc). It turns on in 1.46s and reaches deposition rates as high as 7.2 ˚ As−1 with ∼1mm separation from the target. The mass sensor is a re-purposed quartz oscillator (JTX210) that is commercially available for less than one dollar. Its resolution was measured to be 2.65fg or 7.79E-5 monolayers of Pb.

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