The interaction of EUV light with matter is a critical step in EUV lithographic processes and optimization of the optical material parameters of photoresists and reflector/absorber stacks is crucial to harness the full power of EUV lithography. To optimize these materials, accurate measurements of EUV absorption and reflection are needed to extract the corresponding actinic optical properties and structural parameters. Here, we report on two endstations within imec’s AttoLab that enable actinic EUV absorption and reflection measurements. We commission these tools with measurements on model thin film and photoresist systems and provide extracted optical parameters as well as absorption kinetics, respectively. These results showcase the power of these tools for providing crucial data for material optimization and lithographic simulation.

Micro and nano fabricated bio-systems and bio-devices can be produced once compatible processes for the integration of biomaterials and micro and nano systems are developed. Here, we demonstrate the integration of Alzheimer’s β-amyloid peptide nanofibers with metalized electrodes. The metalized electrodes and Alzheimer’s β-amyloid peptide nanofiber solutions are prepared separately. Metalized electrodes, composed of either chrome/gold or aluminum, with multiple electrodes are prepared using standard photolithography processes. Meanwhile, the Alzheimer’s β-amyloid peptide nanofiber solutions are prepared via the hydration of β-amyloid powder at various concentrations. The self-assembly of the β-amyloid nanofibers, to achieve well-dispersed networks, is optimized through periodic sonication and readdition of aliquots over timed intervals. The β-amyloid peptide solution can be successfully deposited onto the metalized electrodes to yield dense yet well-dispersed nanofiber arrays.