Silicon (100) substrates are ubiquitous in microfabrication and, accordingly, their surface characteristics are important. Herein, we report the analysis of Si (100) via X-ray photoelectron spectroscopy (XPS) using monochromatic Al Kα radiation. Survey scans show that the material is primarily silicon and oxygen with small amounts of carbon, nitrogen, and fluorine contamination. The Si 2p region shows two peaks that correspond to elemental silicon and silicon dioxide. Using these peaks the thickness of the native oxide (SiO2) is estimated using the equation of Strohmeier. The oxygen peak is symmetric. These silicon wafers are used as the substrate for subsequent growth of templated carbon nanotubes in the preparation of microfabricated thin layer chromatography plates.
We apply a suite of analytical tools to characterize materials created in the production of microfabricated thin layer chromatography plates. Techniques used include X-ray photoelectron spectroscopy (XPS), valence band spectroscopy, time-of-flight secondary ion mass spectrometry (ToF-SIMS) in both positive and negative ion modes, Rutherford backscattering spectroscopy (RBS), and helium ion microscopy. Materials characterized include: the Si(100) substrate with native oxide: Si/SiO 2 , alumina (35 nm) deposited as a diffusion barrier on the Si/SiO 2 : Si/SiO 2 /Al 2 O 3 , iron (6 nm) thermally evaporated on the Al 2 O 3 : Si/SiO 2 /Al 2 O 3 /Fe, the iron film annealed in H 2 to make Fe catalyst nanoparticles: Si/SiO 2 /Al 2 O 3 /Fe(NP), and carbon nanotubes (CNTs) grown from the Fe nanoparticles: Si/SiO 2 /Al 2 O 3 /Fe(NP)/CNT. The Fe films and nanoparticles appear in an oxidized state. Some of the analyses of the CNTs/CNT forests appear to be unique: (i) the CNT forest appears to exhibit an interesting 'channeling' phenomenon by RBS, (ii) we observe an odd-even effect in the SIMS spectra of C n -species for n = 1 -6, with the n ≥ 6 ions showing a steady decrease in intensity, and (iii) valence band characterization of CNTs using X-radiation is reported. Initial analysis of the CNT forest by XPS shows that it is 100 at.% carbon. After one year, only ca. 0.25 at.% oxygen is observed. The information obtained from the combination of the different analytical tools provides a more complete understanding of our materials than a single technique, which is analogous to the story of 'The Blind Men and the Elephant'. The raw XPS and ToF-SIMS spectra from this study will be submitted to Surface Science Spectra for archiving.
We describe a method for plasma cleaning silicon surfaces in a commercial tool that removes adventitious organic contamination and enhances silane deposition. As shown by wetting, ellipsometry, and XPS, hydrogen, oxygen, and argon plasmas effectively clean Si/SiO2 surfaces. However, only hydrogen plasmas appear to enhance subsequent low-pressure chemical vapor deposition of silanes. Chemical differences between the surfaces were confirmed via (i) deposition of two different silanes: octyldimethylmethoxysilane and butyldimethylmethoxysilane, as evidenced by spectroscopic ellipsometry and wetting, and (ii) a principal components analysis (PCA) of TOF-SIMS data taken from the different plasma-treated surfaces. AFM shows no increase in surface roughness after H2 or O2 plasma treatment of Si/SiO2. The effects of surface treatment with H2/O2 plasmas in different gas ratios, which should allow greater control of surface chemistry, and the duration of the H2 plasma (complete surface treatment appeared to take place quickly) are also presented. We believe that this work is significant because of the importance of silanes as surface functionalization reagents, and in particular because of the increasing importance of gas phase silane deposition.
Specific chemical and physical properties of volcanic ash particles that could affect their ability to induce ice formation are poorly understood. In this study, the ice nucleating properties of size‐selected volcanic ash and mineral dust particles in relation to their surface chemistry and crystalline structure at temperatures ranging from −30 to −38°C were investigated in deposition mode. Ice nucleation efficiency of dust particles was higher compared to ash particles at all temperature and relative humidity conditions. Particle characterization analysis shows that surface elemental composition of ash and dust particles was similar; however, the structural properties of ash samples were different.
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