The formation and evolution of defects in 4H-SiC Schottky barrier diode high-energy particle detectors have been investigated and correlated with the detectors' properties. Low temperature annealing at 300 °C is found to significantly recover the charge collection efficiency as degraded by 1 MeV electron irradiation. At higher temperatures, an anneal-induced degradation in the detector's performance is observed. Current-voltage, capacitance-voltage, and deep level transient spectroscopy (DLTS) measurements are used to ascertain the effect of defects on the detector performance. The latter reveals that the DLTS defect levels, EH1 and EH3, are related to the initial recovery of the charge collection efficiency.
Fast and thick 4H-SiC epitaxial growth is demonstrated in a vertical-type reactor under a low system pressure within the range 13-40 mbar. A very fast growth rate of up to 250 m/h is obtained. The material quality of the epilayers grown in the reactor is evaluated by low-temperature photoluminescence, deep level transient spectroscopy, microwave photoconductive decay, synchrotron topography and room temperature PL imaging. The carrier lifetime of thick epilayers with or without the application of the C+-implantation/annealing method and extended defects in the epilayers grown on 8º and 4º off substrates are discussed.
We investigated the structures and expansion behavior of double-Shockley stacking faults (DSFs) formed in heavily nitrogen-doped 4H-SiC during annealing. Heavily doped epilayers prepared as specimens were successively annealed. Various types of DSFs showing different shapes and dislocation contrasts were found in photoluminescence and synchrotron X-ray topography images. Taking account of every possible stacking sequence forming DSFs, the structures of various types of DSFs were determined from observations by plan-view transmission electron microscopy (TEM) and cross-sectional high-angle annular dark-field scanning TEM. We found that a bounding dislocation enclosing a DSF splits into two partial dislocations (PDs), and their Burgers vectors are identical, while the distance of the two PDs depended on their core structures (30° Si-, 30° C- or 90° C-core). We also discussed the contrast rule for the dislocation consisting of two PDs in the synchrotron X-ray topography images and the mobile PDs for the DSF expansion in the epilayers with different nitrogen concentrations.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.