Abstract. Fabrication of micro and nanoscale components are in high demand for various applications in diversified fields that include automotive, electronics, communication and medicine. Focused ion beam (FIB) machining is one of the techniques for microfabrication of micro devices. This paper presents a review of FIB machining technology that include its parameter, responses, its important component systems, as well as the fundamentals of imaging, milling (etching) and deposition techniques. The application of FIB in micromachining is also presented.

Micro end milling is one of the most important micromachining process and widely used for producing miniaturized components with high accuracy and surface finish. This paper present the influence of three micro end milling process parameters; spindle speed, feed rate, and depth of cut on surface roughness (Ra) and material removal rate (MRR). The machining was performed using multi-process micro machine tools (DT-110 Mikrotools Inc., Singapore) with poly methyl methacrylate (PMMA) as the workpiece and tungsten carbide as its tool. To develop the mathematical model for the responses in high speed micro end milling machining, Taguchi design has been used to design the experiment by using the orthogonal array of three levels L18 (21×37). The developed models were used for multiple response optimizations by desirability function approach to obtain minimum Ra and maximum MRR. The optimized values of Ra and MRR were 128.24 nm, and 0.0463 mg/min, respectively obtained at spindle speed of 30000 rpm, feed rate of 2.65 mm/min, and depth of cut of 40 μm. The analysis of variance revealed that spindle speeds are the most influential parameters on Ra. The optimization of MRR is mostly influence by feed rate. Keywords:Micromilling,surfaceroughness,MRR,PMMA

The experimental process is a fundamental technique used to determine the nature and behavior of many materials under study. In order to evaluate the fundamental properties of many engineering materials the use of mechanical testing techniques frequently play a crucial role. The development of new materials and the control of material quality are essential in the process of design and in their usage for industrial applications and construction. In this experiment, there were 2 sets (5 samples each) of medium type steel specimens S45C of 0.45% carbon content that were rigorously prepared according to ASTM standards under specific varied parameters. These parameters include the machining cutter speeds on the lathe machine and the mediums selected and temperatures set for the quenching process on the steel specimens in order to affect their overall microstructure. The specimens were then subjected to aggregate mechanical loading using a conventional tensile testing machine. The consequential effect of material structure metamorphosis under the selected quenching techniques was ultimately not part of the study as it involves microscopic analysis of grain boundaries and high-end precision equipment would be necessary to do any significant material analysis. The results of the experiment suggest that the macroscopic (not microscopic) effect of the lathe machining speeds do not significantly affect the tensile material strength of the S45 medium carbon steel specimen. Thus, the mediums and temperatures selected for the quenching process on the specimens had a marginal but significant effect on the elevated levels of tensile mechanical strength and strain of medium type carbon steel.

This paper presents the effect of high speed micro end milling parameters on tool vibration during machining of poly (methyl methacrylate) (PMMA). The main focus is to achieve minimum tool vibration by controlling the cutting parameters; spindle speed, feed rate and depth of cut. An empirical model for tool vibration has been developed using Taguchi method. The orthogonal array, signal-to-noise ratio and analysis of variance revealed that high spindle speed is the most influential parameter to increase the level of tool vibration.