Currently, the standard length measurement method with nanometre resolution is laser interferometry. However, it is difficult to determine an arbitrary length with an accuracy of sub-nanometre or less order using interferometers because they have a nonlinearity problem in fringe interpolation. A phase modulation homodyne interferometer (PMHI) that can be used to determine the optical path difference of an integer multiple of the wavelength (n × λ) with picometre resolution was proposed by IMGC (former Italian Standard Institute). The lattice spacing of approximately 0.246 nm for graphite regular crystalline lattices is uniform and stable over a long range, when the crystals are stress free. These crystals can be used as a reference scale with sub-nanometre resolution. The scanning tunnelling microscope (STM) is emerging as a powerful tool in surface engineering, and enables us to image atoms on a crystalline surface. Therefore, such a crystalline surface can be used as ‘the crystalline scale’ using the STM.In this study, an instrument for calibrating optical encoders is developed by combining a graphite crystalline lattice as a fine scale and the optical fringe of the PMHI as a coarse scale. The instrument consists of a precise linear X-axis sample stage, on which the reference graphite crystal and the optical encoder scale are set, a head of the STM with a YZ tip scanner and a PMHI. The relative displacement of the X-axis sample stage between optical interference dark fringes (= null points) of the PMHI, which is λ/16 times the integer value in the design, can be measured with picometre resolution using the phase modulation technique. A lattice spacing of 0.246 nm on the graphite crystalline surface is derived as the fine scale from the STM image and the optical fringes of the PMHI. In the experiment, the periodical error of the optical encoder, whose minimum resolution is less than a nanometre, is measured using both the lattice spacing of graphite and the optical fringes of the PMHI. The results show that the proposed instrument has the feasibility to calibrate optical encoders with an uncertainty of 10 pm order.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.
customersupport@researchsolutions.com
10624 S. Eastern Ave., Ste. A-614
Henderson, NV 89052, USA
This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.
Copyright © 2024 scite LLC. All rights reserved.
Made with 💙 for researchers
Part of the Research Solutions Family.