Plasma immersion ion implantation (PIII) of stainless steels with nitrogen has been successfully used for surface hardening purposes. This process has been carried out inside a toroidal discharge chamber in a DC/RF plasma. The RF plasma was created by one antenna located inside the chamber, diametrically opposite to the DC electrode. The latter is polarized with 1 kV and then the discharge is controlled by varying the gas pressure before the RF signal is applied. The main plasma parameters were established by means of double electric probes yielding electron temperature values within 0.5-1.5 eV and density values within 1.5×1015 to 4×10 15 m −3 for the DC case while 1.5-3.0 eV and 7×10 14 to 3×10 15 m −3 were reached with RF assisted DC. We present in this work the experimental results obtained from a PIII process applied to AISI 304 stainless steel plates. The outcome shows that the Vickers hardness has been incremented according to the gas pressure within the 1×10 −1 to 1×10 −3 mbar range. The treated plates were analyzed by scanning electron microscopy (SEM) and the results point to an increased percentage of nitrogen, around 20%. By means of x-ray diffractometry (XRD) the gamma expanded phase and compounds such as Fe3NiN, Ni4N, FeNiN and Fe3N were determined.
Plasma immersion ion implantation (PIII) has proved to be a good method to implant ions into materials in order to modify their surface properties. In this article, we describe the design and construction of a small and low cost PIII device. The instrumentation consists of: (i) a simple plasma immersion experimental setup for ion implantation based on direct current glow discharges, (ii) a 25 kV pulse generator, (iii) an electrical probe system endowed with a guard to carry out diagnostics of the plasma parameters, and (iv) an automatic spectroscopy system for determining the plasma temperature. A study of the sheath expansion has been considered in order to fulfill the requirements of electron temperature, plasma density, high voltage bias, pulse frequency, and pulse duration for an adequate PIII process.
One alternative application in the decomposition and destruction of volatile organic compounds (VOCs) by a silent plasma dielectric barrier discharge (DBD) has been successfully accomplished. For this purpose, we have designed and constructed two pairs of cells, of rectangular and circular geometries, 333.96 cm 3 each cell, and a similar second pair of 62.25 cm 3 each one. Resonant inverters for low (3.3 kHz) and high (100 kHz) frequencies were also designed and applied to these cells. The specification of the main physical parameters of each cell contemplates: i) a first order degradation ratio of the compound, and ii) air breakdown at atmospheric pressure as a function of the carrying gas. The power consumed by the cells during the discharges was computed both theoretically and experimentally by Manley's method. The equipment was applied to the degradation of toluene, which has been degraded by an oxidation process in air-oxygen and argon-oxygen gas mixtures at atmospheric pressure within the cells. The destruction efficiency was measured as a function of the initial concentration. When air is used as an oxidant, a clear formation of solid products on the walls of dielectric glass plates has been observed, such deposits being polymeric in nature. These deposits seem to be responsible for a decline in the degradation efficiency of the treated compounds.
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