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Thin HTSC films of YBa2Cu3O7-x with high c-axis orientation have been grown using PE MOCVD technique and adducts of copper, yttrium and barium acetylacetonate with α,α'- dipyridyl as precursors. In-situ films were deposited in N2 and O2 gas reactant mixture reduced substrate temperatures. HTSC films prepared on SrTiO3, ZrO2(Y) and MgO substrates have rather high electric characteristics (e.g. jc ≈ 104 - 105). The problem of β-diketonate adducts using as precursors for plasma enhanced chemical vapor deposition of superconductive films was discussed