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A new interferometric method for ultra-precise measurement of laser-beam angular deflection is proposed. The angular tilt of a measuring device in relation to the beam axis also can be measured. The method is based on interference fringe period analysis in the selected plane of measurement. The theoretical basis and experimental verification of the method are presented. It is shown that by using the proposed technique, it is possible to measure the laser beam angular deflection or instability with ultrahigh resolution reaching single nanoradians. The proposed method allows the measurement and further compensation of laser beam deflections in a very compact design.

This paper provides the results of work on a new method for metrological laser beam steering for the purpose of angular stabilization. Frequency stabilized metrological lasers are used for interference measurements of length and angle. Angular deviation of the beam may cause cosine errors when measuring displacements. This paper presents a method for metrological laser beam deflection with an air wedge of variable refractive index. The change in the index is achieved by changing the air pressure in the wedge volume. The implemented system produced a range of angular displacements of the 0.1 mrad (10 rad; 100 μrad) beam with a resolution of 10 rad.

A system for precise angular laser beam deflection by using a plane mirror is presented. The mirror was fixed to two supports attached to its edges. This article details the theoretical basis of how this deflector works. The spring deflection of a flat circular metal plate under a uniform axial buckling was used and the mechanical stress was generated by a piezoelectric layer. The characteristics of the deformation of the plate versus the voltage control of the piezoelectrics were examined and the value of the change resolution possible to obtain was estimated. An experimental system is presented and an experiment performed to examine this system. As a result, a resolution of displacement of 10 -8 rad and a range of 10 -5 rad were obtained.Keywords: laser beam angular drifts, beam deflector, laser beam scanning.