This paper presents a development of a microtransformer device fabricated using MEMS technology. The device is designed for higher switching frequencies beyond to 50 MHz power applications. The microtransformer features a closed magnetic core and six identity coils (three coils on primary and three coils on secondary side). Depending on connecting technique, this design allows a wide flexibility to set different values of inductance and of transformer winding ratio. As a magnetic core material Fe-Co alloy is applied, this device shows a significant improvement compared to the first fabricated prototypes with Ni-Fe magnetic core.

Abstract. This paper describes a development of a microtransformer device fabricated using thin film technology. The device is designed for higher switching frequencies beyond to 50 MHz power applications. A especially by the microtransformer is a design, which allows wide flexibility of a device by choosing a different values of an inductance and of a windings ratio. The microtransformer device is integrated on silicon substrate consisting of a closed magnetic core and six coils. Both, primary and secondary device side consist three coils. Therefore, this design allows using of a device for different switching frequencies. As a magnetic material for transformer core a permalloy NiFe45/55 was chosen.