Continuous
development of Si photonics requires ecological and cost-effective
materials. In this work, SiGe nanocrystals (NCs) embedded in TiO2 are investigated as a photosensitive material for visible
(VIS) to short-wave infrared (SWIR) broad-range detection. The TiO2 matrix has the advantage of a lower band gap than SiO2, facilitating transport of photogenerated carriers in NCs.
The advantage of SiGe NCs over Ge NCs is emphasized by elucidating
the mechanisms involved in rapid thermal annealing (RTA)-induced nanocrystallization.
An efficiently increased NC stabilization is achieved by avoiding
the detrimental fast Ge diffusion. For this, the structure, morphology,
and composition were carefully characterized by high-resolution transmission
electron microscopy, energy-dispersive X-ray spectroscopy, X-ray diffraction,
and Raman spectroscopy. Two types of structures were investigated,
a film of SiGe–TiO2 alloy and a multilayer of a
stack of six SiGe/TiO2 pairs. The layers have been deposited
on Si wafers using magnetron sputtering of Si, Ge, and TiO2 followed by RTA in an inert atmosphere. The stabilization of SiGe
NCs is achieved by the formation during RTA of protective SiO2 thin layers through Si oxidation at the SiGe NC surface,
acting as a barrier for Ge diffusion. Thus, embedded Ge-rich SiGe
NCs are obtained, resulting in the SWIR extension of the spectral
photocurrent up to 1700 nm for films and 1600 nm for multilayers.
This study has shown that in multilayers, the local anisotropy of
crystallization is compensated by the stress field developed in the
SiGe lattice, highly visible in the bottom part. Also, SiGe crystallizes
faster than TiO2 in the rutile phase, and therefore, TiO2 remains mainly amorphous.
Orthorhombic HfO2 exhibits nanoscale ferroelectricity that opens the perspective of ultra-scalable CMOS integration of ferroelectric memories. However, many aspects of the metastable orthorhombic crystallization mechanisms need still to be elucidated...
We present a detailed study regarding the bandgap dependence on diameter and composition of spherical Ge-rich GexSi1−x nanocrystals (NCs). For this, we conducted a series of atomistic density functional theory (DFT) calculations on H-passivated NCs of Ge-rich GeSi random alloys, with Ge atomic concentration varied from 50 to 100% and diameters ranging from 1 to 4 nm. As a result of the dominant confinement effect in the DFT computations, a composition invariance of the line shape of the bandgap diameter dependence was found for the entire computation range, the curves being shifted for different Ge concentrations by ΔE(eV) = 0.651(1 − x). The shape of the dependence of NCs bandgap on the diameter is well described by a power function 4.58/d1.25 for 2–4 nm diameter range, while for smaller diameters, there is a tendency to limit the bandgap to a finite value. By H-passivation of the NC surface, the effect of surface states near the band edges is excluded aiming to accurately determine the NC bandgap. The number of H atoms necessary to fully passivate the spherical GexSi1−x NC surface reaches the total number atoms of the Ge + Si core for smallest NCs and still remains about 25% from total number of atoms for bigger NC diameters of 4 nm. The findings are in line with existing theoretical and experimental published data on pure Ge NCs and allow the evaluation of the GeSi NCs behavior required by desired optical sensor applications for which there is a lack of DFT simulation data in literature.
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