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Electron energy-loss spectroscopy (EELS) analyses have been performed on a sol-gel deposited lead zirconate titanate film, showing that EELS can be used for heavy as well as light element analysis. The elemental distributions within the sol-gel layers are profiled using the Pb N 6,7 -edges, Zr M-edges, Ti L-edges and O K-edge. A multiple linear least squares fitting procedure was used to extract the Zr signal which overlaps with the Pb signal.Excellent qualitative information has been obtained on the distribution of the four elements.

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It has been found that metallic surfaces of Cu, Au, Al, W, Ta, Mo, and Ni when bombarded with 500-v Hg+ ions at angles of incidence other than zero, exhibit a definite surface structure or pattern. This pattern consists of hillocks or spires oriented parallel to the direction of the incoming ion beam. In Cu and Ni, steps oriented perpendicularly to the ion beam were also found. This surface pattern provides visual evidence that the sputtering process at low ion energies is a momentum transfer process. Since redeposition of sputtered atoms on the hillocks and steps could be quite large, angle of incidence yield measurements could be in error unless they are made before formation of the hillocks.

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