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ZrO 2 films with a sub-10-nm thickness and a roughness of about 0.2 nm have been prepared on Si(001) by a sol-gel process based on zirconium-(IV)-n-propoxide. The topography of the obtained samples has been controlled by atomic force microscopy. Chemical composition and interface reactions of the deposited films have been studied by x-ray photoemission spectroscopy and Auger electron spectroscopy. The ZrO2 films are stable against heating (up to 700 °C) in a moderate oxygen atmosphere (2×10−5 mbar oxygen partial pressure). Minor changes in the surface composition occur after rapid annealing up to 1000 °C.

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