We report on synthesis of spherical Au nanoparticles at the surface and embedded in carbonaceous matrix by 150 keV Ar ion irradiation of thin Au film on polyethyleneterepthlate (PET). The pristine and irradiated samples are characterized by Rutherford backscattering spectrometry (RBS), atomic force microscopy, scanning electron microscopy and transmission electron microscopy (TEM) techniques. RBS spectra reveal the sputtering of Au film and interface mixing, increasing with increasing fluence. Surface morphology shows that at the fluence of 5 × 1015 ions cm−2, dewetting of thin Au film begins and partially connected nanostructures are formed whereas, at the higher fluence of 5 × 1016 ions cm−2, isolated spherical Au nanoparticles (45 ± 20 nm) are formed at the surface. Cross-sectional TEM observations also evidence the Au nanoparticles at the surface and mixed metal–polymer region indicating the formation of nanocomposites with small Au nanoparticles. The results are explained by the crater formation, sputtering followed by dewetting of the thin Au film and interdiffusion at the interface, through molten zones due to thermal spike induced by Ar ions.
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