While the effect of vacuum venting has been reported for injection molding of micro and nanoscale features, the limited research has produced conflicting results. To clarify the positive effect of vacuum venting on replication of microscale features, this work focused on the interactions between vacuum venting and (1) feature size, (2) material type in terms of melt viscosity and wettability, and (3) injection velocity and mold temperature. A metal-polymer hybrid tooling with a range of positive microscale features was employed to mold polystyrene and polymethylmethacrylate parts. Overall, vacuum venting always effective in feature definition (sharpness of edges) enhancement, but provided increases in depth ratio that depended on material (melt viscosity and wettability) and processing conditions (i. e., injection velocity, and mold temperature).

Although high aspect ratio micro and nanoscale polymer features have been replicated in a range of polymers using injection molding, researchers have also used tooling inserts with a range of sizes, aspect ratios, and tooling materials. In this work, microscale features with molded in polymethylmethacrylates using three types of tooling with similar features. The tooling materials included silicon wafers with an antistiction coating, gold-coated nickel inserts, and a metal-polymer hybrid tooling. Tooling was evaluated based on the ease of melt filling and part ejection; the replication quality as characterized using optical profilometry, confocal microscopy, and scanning electron microscopy; and the damage to the tooling after repeated use. With lower aspect ratio features, the tooling type did not significantly affect replication, but for higher aspect ratio features the hybrid tooling provided far better replication than the silicon tooling. This difference was attributed to retardation of heat transfer in the features of the hybrid tooling. All three tooling materials exhibited polymer-free surfaces after injection molding.