Abstract. In this paper, magnetic force microscopy (MFM) probes with different coating materials were characterized under AC magnetic field. A perpendicular magnetic write head similar to those used in hard disk drives was employed as the AC magnetic field generator. In order to measure a response of MFM probes to AC magnetic field, a MFM probe under test was scanned, at a scan height of 10 nm, across the surface of the magnetic write head. During MFM imaging, the write head was biased by a sufficient magnitude of AC current, approximately 30 mA. A spectral analysis for a frequency sweep from 1 kHz to 100 MHz was extracted from post-processing MFM images. As expected, a MFM probe coated with hard magnetic alloys, i.e. FePt, has the lowest response to AC magnetic fields. MFM probes coated with soft magnetic alloys, i.e. NiFe and NiCoCr, have a relatively high and flat response across the frequency range. Ni coated MFM probe has the highest response to AC magnetic fields. In addition, CoCr and NiCo coated MFM probes show lower response than NiFe and NiCoCr probes at low frequencies; however, theirs response to AC magnetic field increase for the AC magnetic field with a frequency above 50 kHz. This can be implied that those MFM probes are a good candidate for being used to study the high-frequency performance of perpendicular magnetic write heads. Noting that response of all MFM probes significantly decreased when driven frequencies above 1 MHz due to the limitation of the hardware, i.e. response of quadrant photodiode and op-amp in a pre-amplifier.

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