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The phase shifted vertical side wall gratings are designed and numerically simulated on a submicron SOI waveguide to obtain the performance characteristics needed for an integrated refractive index sensor. The gratings are designed to obtain narrow band width, high transmittivity and sharp line shape in the resonant transmission so that the sensor sensitivity can be improved. The proposed sensor is easy to fabricate and will provide a linear response over a wide wavelength range with a compact structure dimension which is suitable for label free biosensing applications. The detection limit of the sensor is investigated through both wavelength shift and intensity measurement method and the performance parameter is compared with other silicon based structures like Mach-Zehnder interferometer, ring resonator and surface corrugated Bragg grating.

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