Plasmonic metasurfaces have recently attracted much attention due to their ability to abruptly change the phase of light, allowing subwavelength optical elements for polarization and wavefront control. However, most previously demonstrated metasurface designs suffer from low coupling efficiency and are based on metallic resonators, leading to ohmic loss. Here, we present an alternative approach to plasmonic metasurfaces by replacing the metallic resonators with high-refractive-index silicon cut-wires in combination with a silver ground plane. We experimentally demonstrate that this meta-reflectarray can be used to realize linear polarization conversion with more than 98% conversion efficiency over a 200 nm bandwidth in the short-wavelength infrared band. We also demonstrate optical vortex beam generation using a meta-reflectarray with an azimuthally varied phase profile. The vortex beam generation is shown to have high efficiency over a wavelength range from 1500 to 1600 nm. The use of dielectric resonators in place of their plasmonic counterparts could pave the way for ultraefficient metasurface-based devices at high frequencies.

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All-dielectric metamaterials offer a potential low-loss alternative to plasmonic metamaterials at optical frequencies. Here, we take advantage of the low absorption loss as well as the simple unit cell geometry to demonstrate large-scale (centimeter-sized) all-dielectric metamaterial perfect reflectors made from silicon cylinder resonators. These perfect reflectors, operating in the telecommunications band, were fabricated using self-assembly based nanosphere lithography. In spite of the disorder originating from the self-assembly process, the average reflectance of the metamaterial perfect reflectors is 99.7% at 1530 nm, surpassing the reflectance of metallic mirrors. Moreover, the spectral separation of the electric and magnetic resonances can be chosen to achieve the required reflection bandwidth while maintaining a high tolerance to disorder. The scalability of this design could lead to new avenues of manipulating light for low-loss and large-area photonic applications.

All-dielectric metamaterials utilizing Mie resonances in high-permittivity dielectric resonators offer a low-loss alternative to plasmonic metamaterials. Here we present the demonstration of a single-negative all-dielectric metamaterial, comprised of a single layer of cylindrical silicon resonators on a silicon-on-insulator substrate, that possesses peak reflectance over 99% and an average reflectance over 98% across a 200 nm wide bandwidth in the short-wavelength infrared region. The study is also extended to disordered metamaterials, demonstrating a correlation between the degree of disorder and the reduction in reflectance. It is shown that near-unity reflection is preserved as long as resonator interaction is avoided. Realization of near-unity reflection from disordered metamaterials opens the door to large-area implementations using low-cost self-assembly based fabrication techniques.

Artificially created surfaces or metasurfaces, composed of appropriately shaped subwavelength structures, namely, meta‐atoms, control light at subwavelength scales. Historically, metasurfaces have used radiating metallic resonators as subwavelength inclusions. However, while resonant optical metasurfaces made from metal have been sufficiently subwavelength in the propagation direction, they are too lossy for many applications. Metasurfaces made out of radiating dielectric resonators have been proposed to solve the loss problem, but are marginally subwavelength at optical frequencies. Here, subwavelength resonators made out of nonradiating dielectrics are designed. The resonators are decorated with appropriately placed scatterers, resulting in a meta‐atom with an engineered electromagnetic response. As an example, a metasurface that yields an electric response is fabricated, experimentally characterized, and a method to obtain a magnetic response at optical frequencies is theoretically demonstrated. This design methodology paves the way for metasurfaces that are simultaneously subwavelength and low loss.