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The poster descripts the new Micro-Hybrid high temperature gas measurement module for carbon dioxide. The module based on the well known NDIR measurement principle. The basics of this concept is descript in the text. Furthermore, Micro-Hybrid special infrared components line for harsh environments is presented. The MEMS emitter and highly sensitive detectors are used for high temperatures up to 190 °C and also for low temperat ures down to -50 °C. This wide temperature range is possible through special packaging technologies like soldering and welding. The prototype bases customized gas sensors. Concluding, the sensor parameters are listed.

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Based on the well-known optical NDIR gas measurement principle Micro-Hybrid developed an advanced gas sensor which works in harsh environments like extraordinary moistures and high temperatures up to 200 °C. A field of application is controlling the CO 2 atmosphere and the measurement of the humidity in sterilisable incubators. Core components of the developed gas sensor are highly effective and high temperature stable infrared emitter and detector MEMS chips. The precondition for long term stability is a real hermetic housing especially under these rough conditions. Common gluing technologies are not suitable for such terms. To achieve these requirements Microhybrid developed sophisticated packaging technologies for the IR-MEMS chips and the housing components which are appropriate for harsh environments stable hermetic sealing like high temperatures, high humilities or solvent atmospheres.